NEW OMVPE REACTOR FOR LARGE AREA UNIFORM DEPOSITION OF INP AND RELATED ALLOYS

被引：11

作者：

PALMATEER, SC

GROVES, SH

CAUNT, JW

HOVEY, DL

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1989年 / 18卷 / 05期

关键词：

D O I：

10.1007/BF02657480

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：645 / 649

页数：5

共 13 条

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