FACING TARGETS SPUTTERING SYSTEM FOR DEPOSITING CO-CR PERPENDICULAR MAGNETIC RECORDING MEDIA

被引:4
作者
NIIMURA, Y
NAOE, M
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 01期
关键词
D O I
10.1116/1.574143
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:109 / 110
页数:2
相关论文
共 4 条
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[3]   THE INFLUENCE OF ARGON GAS-PRESSURE FOR SPUTTERED CO-CR THIN-FILM PREPARATION [J].
NIIMURA, Y ;
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[4]   THE DEPENDENCE OF MAGNETOSTRICTION OF SPUTTERED CO-CR THIN-FILMS ON CRYSTAL-STRUCTURE [J].
NIIMURA, Y ;
NAOE, M .
IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) :1447-1449