PREPARATION OF AS-GROWN BIPBSRCACUO THIN-FILMS BY ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA SPUTTERING

被引:7
作者
NISHIMORI, Y [1 ]
MINOMO, S [1 ]
TANIGUCHI, M [1 ]
SUGIYO, M [1 ]
FUKUMOTO, Y [1 ]
FUJIWARA, Y [1 ]
KOBAYASHI, T [1 ]
机构
[1] OSAKA UNIV, FAC ENGN SCI, TOYONAKA, OSAKA 560, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 07期
关键词
D O I
10.1143/JJAP.28.L1220
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L1220 / L1222
页数:3
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