MODELING ASPECTS OF SURFACE-ACOUSTIC-WAVE GAS SENSORS

被引：4

作者：

BANDA, PA

WLODARSKI, WB

SCOTT, JR

机构：

[1] Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology, Melbourne, Vic. 3001

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 42卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(94)80068-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper a model is presented for a surface acoustic wave (SAW) gas sensor. The model comprises the design of the SAW device on a piezoelectric substrate, the electronic design of the amplifier running the SAW device and the selective film to be deposited onto the SAW device. This model has been implemented using a computer-aided engineering tool, J-Omega, for high and radio frequencies. This allows an evaluation of the sensor system prior to fabrication as well as optimization of the overall response.

引用

页码：638 / 642

页数：5

共 5 条

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