THERMAL EFFECTS IN SPUTTERING

被引:145
作者
KELLY, R [1 ]
机构
[1] MCMASTER UNIV,INST MAT RES,HAMILTON L8S 4M1,ONTARIO,CANADA
关键词
D O I
10.1016/0039-6028(79)90345-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:280 / 318
页数:39
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