LANGMUIR PROBE STUDIES AND ION ENERGIES IN GAS-DISCHARGES USED FOR CLEANING VACUUM CHAMBERS

被引：9

作者：

MATHEWSON, AG

GRILLOT, A

HAZELTINE, S

LI, KL

FOAKES, A

STORI, H

机构：

来源：

关键词：

D O I：

10.1016/S0042-207X(81)80040-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：337 / 344

页数：8

相关论文

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