ON THE INFLUENCE OF RESIDUAL-STRESSES AND DENSITY-FLUCTUATIONS ON THE CRYSTALLIZATION OF AMORPHOUS-CARBON FILMS

被引：25

作者：

POMPE, W ^{[1
]}

SCHEIBE, HJ ^{[1
]}

RICHTER, A ^{[1
]}

BAUER, HD ^{[1
]}

BEWILOGUA, K ^{[1
]}

WEISSMANTEL, C ^{[1
]}

机构：

[1] TH KARL MARX STADT,SEKT PHYS,DDR-9010 KARL MARX STADT,GER DEM REP

来源：

关键词：

D O I：

10.1016/0040-6090(86)90071-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：77 / 92

页数：16

共 39 条

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