SPUTTER-DEPOSITED ERBIUM-DOPED Y2O3 ACTIVE OPTICAL WAVE-GUIDES

被引：37

作者：

HOEKSTRA, TH

LAMBECK, PV

ALBERS, H

POPMA, TJA

机构：

[1] Mesa Research Institute, NL-7500 AE Enschee

来源：

ELECTRONICS LETTERS | 1993年 / 29卷 / 07期

关键词：

OPTICAL WAVE-GUIDES; OPTICAL AMPLIFIERS; LASERS;

D O I：

10.1049/el:19930390

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A signal enhancement of 10 dB at 1535 nm with a low launched pump power of 1 mW at 1480 nm is achieved for sputtered Er3+:Y2O3 channel waveguides on oxidised silicon substrates. With the developed reactive co-sputtering process using sputterguns the erbium concentration can be varied easily and reproducibly.

引用

页码：581 / 583

页数：3

共 7 条

[1] PHOTOLUMINESCENCE AND ATTENUATION OF SPRAY-PYROLYSIS-DEPOSITED ERBIUM-DOPED Y2O3 PLANAR OPTICAL WAVE-GUIDES [J].