PERFORMANCE OF PUPIL-FILTERING STEPPER-LENS SYSTEM

被引：5

作者：

FUKUDA, H

KOBAYASHI, Y

TAWA, T

OKAZAKI, S

机构：

[1] Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo

[2] Minolta Camera Co., Takatsuki, Osaka

[3] Instrument Division, Hitachi, Ltd., Katsuta

来源：

MICROELECTRONIC ENGINEERING | 1995年 / 27卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(94)00091-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Various types of pupil filters are applied to an i-line stepper lens, enhancing the depth of focus (DOF) for window, L/S, and isolated line patterns by about three times. This achieves a large DOF with a small optical proximity effect, and is also applicable to random patterns.

引用

页码：213 / 216

页数：4

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