The design instrumentation and performance of a high-resolution ICP mass spectrometer in resolving interelement spectral overlaps is reported. A high resolution of 43 000 was obtained by using a double-focusing magnetic sector mass analyzer coupled with an ICP ionization source through a three-stage differential evacuation system and a Q-lens. Resolution of isobar overlaps is demonstrated for Se-76/Ge-76 and Sm-150/Nd-150 at a 1 ppm concentration level.