MOVPE GROWTH AND CHARACTERIZATION OF DOPED CDXHG1-XTE STRUCTURES

被引:18
作者
MAXEY, CD
WHIFFIN, PAC
EASTON, BC
机构
[1] Philips Res. Labs., Redhill
关键词
D O I
10.1088/0268-1242/6/12C/006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes work carried out towards achieving extrinsically doped CdxHg1-xTe (CMT) heterostructures grown with stable dopants and sharp junctions. Both acceptor and donor doping of CMT has been achieved in our MOVPE growth reactor using the interdiffused multilayer process at approximately 400-degrees-C with diethyltellurium (DET) as the tellurium alkyl source. The two dopants used were arsenic, introduced as AsH3, and iodine, as vapour from the solid element. The donor doping range has been extended by the use of a concentrically arranged double-injection-tube system which reduced the pre-reaction between the cadmium alkyl and the iodine vapour. Investigations have been carried out into the growth of various double-layer structures which incorporate either a single dopant transition or a double transition, as in a fully doped structure. Depth profiling to obtain the electrical characteristics, chemical dopant concentrations and alloy compositions of As-doped (x = 0.3) on undoped (x = 0.21) CMT heterostructures has shown that pn structures have been produced after suitable Hg anneal treatments. Iodine-doped x = 0.2 layers on As-doped x = 0.3 layers have also exhibited pn transitions. Results from fully doped homojunction layers grown with approximately 1 x 10(17) I (atomic) cm-3 n-type regions on (1-4) x 10(16) atoms As cm-3 p-type regions have also been obtained which show sharp electrical junctions.
引用
收藏
页码:C26 / C30
页数:5
相关论文
共 14 条
[1]  
Elliott CT, Ashley T, Electron. Lett., 21, 10, (1985)
[2]  
White AM, Infrared Phys., 26, 5, (1986)
[3]  
Elliott CT, Semicond. Sci. Technol., 5, 6, (1990)
[4]  
Bubulac LO, Lo DS, Tennant WE, Edwall DD, Chen JC, Ratusnik J, Robinson JC, Bostrup G, Appl. Phys. Lett., 50, 22, (1987)
[5]  
Capper P, Maxey CD, Whiffin PAC, Easton BC, J. Crystal Growth, 97, 3-4, (1989)
[6]  
Maxey CD, Capper P, Whiffin PAC, Easton BC, Gale I, Clegg JB, Harker A, Jones CL, J. Crystal Growth, 101, 1-4, (1990)
[7]  
Tunnicliffe J, Irvine SJC, Dosser OD, Mullin JB, J. Crystal Growth, 66, 1, (1984)
[8]  
Easton BC, Maxey CD, Whiffin PAC, Capper P, Impurities and metalorganic chemical-vapor deposition growth of mercury cadmium telluride, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 9, 3, (1991)
[9]  
Whiffin PAC, Easton BC, Capper P, Maxey CD, J. Crystal Growth, 79, 1-3, (1986)
[10]  
Jones CL, Capper P, Quelch MJT, Brown M, J. Crystal Growth, 64, 3, (1983)