RATE CONSTANTS FOR F- TRANSFER FROM SF6- TO FLUORINATED GASES AND SO2 - TEMPERATURE-DEPENDENCE AND IMPLICATIONS FOR ELECTRICAL DISCHARGES IN SF-6

被引:11
作者
SIECK, LW [1 ]
VANBRUNT, RJ [1 ]
机构
[1] NBS,DIV ELECTRYST,GAITHERSBURG,MD 20899
关键词
D O I
10.1021/j100314a025
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:708 / 713
页数:6
相关论文
共 29 条
[1]   A KINETIC-MODEL FOR PLASMA-ETCHING SILICON IN A SF6/O2 RF DISCHARGE [J].
ANDERSON, HM ;
MERSON, JA ;
LIGHT, RW .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) :156-164
[2]   NEGATIVE ION-MOLECULE REACTIONS OF SF4 [J].
BABCOCK, LM ;
STREIT, GE .
JOURNAL OF CHEMICAL PHYSICS, 1981, 75 (08) :3864-3870
[3]   ROLE OF BINDING-ENERGIES IN A-.B AND A.B- COMPLEXES IN THE KINETICS OF GAS-PHASE ELECTRON-TRANSFER REACTIONS - A-+B=A+B- INVOLVING PERFLUORO COMPOUNDS - SF6, C6F11CF3, C6F6 [J].
CHOWDHURY, S ;
KEBARLE, P .
JOURNAL OF CHEMICAL PHYSICS, 1986, 85 (09) :4989-4994
[4]  
CHRISTOPHOROU LG, IN PRESS
[5]   SF6 DECOMPOSITION IN GAS-INSULATED EQUIPMENT [J].
CHU, FY .
IEEE TRANSACTIONS ON ELECTRICAL INSULATION, 1986, 21 (05) :693-725
[6]   ELECTRON-AFFINITY OF SF6 AND PERFLUOROMETHYLCYCLOHEXANE - THE UNUSUAL KINETICS OF ELECTRON-TRANSFER REACTIONS A-+B=A+B-, WHERE A=SF6 OR PERFLUORINATED CYCLO-ALKANES [J].
GRIMSRUD, EP ;
CHOWDHURY, S ;
KEBARLE, P .
JOURNAL OF CHEMICAL PHYSICS, 1985, 83 (03) :1059-1068
[7]  
HERRON JT, 1987, J PHYS CHEM REF DATA, V16, P1, DOI 10.1063/1.555791
[8]  
KEBARLE P, 1984, IONIC PROCESSES GAS, P135
[9]  
KEESEE RG, IN PRESS J PHYS CHEM
[10]   FLUORIDE AND CHLORIDE AFFINITIES OF MAIN GROUP OXIDES, FLUORIDES, OXOFLUORIDES, AND ALKYLS - QUANTITATIVE SCALES OF LEWIS ACIDITIES FROM ION-CYCLOTRON RESONANCE HALIDE-EXCHANGE EQUILIBRIA [J].
LARSON, JW ;
MCMAHON, TB .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1985, 107 (04) :766-773