AN ANALYSIS OF LTE EFFECTS IN INDUCTIVELY COUPLED RF PLASMAS

被引：28

作者：

GRAVELLE, DV ^{[1
]}

BEAULIEU, M ^{[1
]}

BOULOS, MI ^{[1
]}

GLEIZES, A ^{[1
]}

机构：

[1] UNIV TOULOUSE 3,CTR PHYS ATOM,CNRS,UA 277,F-31062 TOULOUSE,FRANCE

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1989年 / 22卷 / 10期

关键词：

D O I：

10.1088/0022-3727/22/10/009

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1471 / 1477

页数：7

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