INCIDENT-ANGLE DEPENDENCE OF PEAK ENERGIES OF AI AND SI LVV AUGER ELECTRONS FOR AR-12+ ION IMPACT

Energy spectra of Al and Si LVV Auger electrons were measured for the impact of Ar12+ ions with an incident energy of 1.3 MeV/amu at incident angles of 39° and 4° relative to the surface of the target. The energy spectra for the 4° incidence show a decrease in peak energies and a broadening in line widths compared to those for the 39° incidence. Such spectral changes for the 4° incidence are explained by the assumptions that the peak energy decrease is in proportion to the number of holes in the valence band which are produced by secondary electron emission, and that their number decays exponentially with time. © 1990.