PULSED-LASER DEPOSITION OF OPTICAL WAVE-GUIDING LINBO3 FILMS ON SIO2 SUBSTRATE

被引：10

作者：

GUO, XL ^{[1
]}

LIU, JM ^{[1
]}

LUI, ZG ^{[1
]}

ZHU, SI ^{[1
]}

机构：

[1] CTR ADV STUDIES SCI & TECHNOL MICROSTRUCT,NANJING 210093,PEOPLES R CHINA

来源：

CHINESE PHYSICS LETTERS | 1995年 / 12卷 / 04期

关键词：

D O I：

10.1088/0256-307X/12/4/016

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The optical waveguiding lithium niobate (LiNbO3) films have been prepared on (001)-oriented SiO2 substrates by pulsed laser deposition technique. The x-ray diffraction and scanning electron microscopy were used to characterize the as-grown films, and revealed that highly (012)-textured LiNbO3 films with smooth surface were achieved. The optical waveguiding properties of these films were demonstrated by m-line measurements of transverse-magnetic and transverse-electric multimodes.

引用

页码：249 / 252

页数：4

共 7 条

[1]

COTELL CM, 1992, MRS BULL, P44

[2] EPITAXIAL-GROWTH OF LINBO3-LITAO3 THIN-FILMS ON AL2O3 [J].

KANATA, T ;

KOBAYASHI, Y ;

KUBOTA, K .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (07) :2989-2993

[3]

LIU J, UNPUB APPL PHYS LETT

[4]

LIU JM, 1994, IN PRESS MATER LETT

[5]

NISHIHARA H, 1989, OPTICAL INTEGRATED C, P120

[6] LINBO3 THIN-FILM OPTICAL WAVE-GUIDE GROWN BY LIQUID-PHASE EPITAXY AND ITS APPLICATION TO 2ND-HARMONIC GENERATION [J].

TAMADA, H ;

YAMADA, A ;

SAITOH, M .

JOURNAL OF APPLIED PHYSICS, 1991, 70 (05) :2536-2541

[7] MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMS [J].

TIEN, PK ;

ULRICH, R ;

MARTIN, RJ .

APPLIED PHYSICS LETTERS, 1969, 14 (09) :291-&

← 1 →