MICROMACHINED AFM TRANSDUCER WITH DIFFERENTIAL CAPACITIVE READ-OUT

被引：16

作者：

BAY, J ^{[1
]}

BOUWSTRA, S ^{[1
]}

LAEGSGAARD, E ^{[1
]}

HANSEN, O ^{[1
]}

机构：

[1] AARHUS UNIV,INST PHYS & ASTRON,DK-8000 AARHUS C,DENMARK

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1995年 / 5卷 / 02期

关键词：

D O I：

10.1088/0960-1317/5/2/027

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A differential capacitive atomic force microscope (AFM) transducer with integrated tip for use in ultra-high vacuum is presented. It is fabricated by the dissolved wafer technique with multiple etch stop using highly boron-doped ipitaxial layers. The tip is fabricated using anisotropic etching and radii of curvature of the order of 60 nm were measured. Measured sensitivities agree well with the presented model.

引用

页码：161 / 165

页数：5

共 8 条

[1] ATOMIC FORCE MICROSCOPE [J].