INSITU AND REAL-TIME OBSERVATION OF OPTICAL-CONSTANTS OF METAL-FILMS DURING GROWTH

被引：30

作者：

YANO, M

FUKUI, M

HARAGUCHI, M

SHINTANI, Y

机构：

[1] Department of Electrical and Electronic Engineering, Faculty of Engineering, The University of Tokushima, Tokushima

来源：

SURFACE SCIENCE | 1990年 / 227卷 / 1-2期

关键词：

D O I：

10.1016/0039-6028(90)90400-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Optical constants of metal films with an average thickness in the 0-50 nm range have been studied by using the attenuated total reflection technique. The measurements were performed in situ during the growth of evaporated films. The effective optical constants of ultrathin discontinuous metal films have been evaluated precisely. © 1990.

引用

页码：129 / 137

页数：9

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