OPTICAL MICROSCOPE IMAGING OF LINES PATTERNED IN THICK LAYERS WITH VARIABLE EDGE-GEOMETRY - THEORY

被引：57

作者：

NYYSSONEN, D

KIRK, CP

机构：

[1] VICKERS INSTRUMENTS,YORK Y03 7SD,ENGLAND

[2] UNIV LEEDS,DEPT ELECT & ELECTR ENGN,LEEDS LS2 9JT,W YORKSHIRE,ENGLAND

[3] NBS,GAITHERSBURG,MD 20899

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1988年 / 5卷 / 08期

关键词：

D O I：

10.1364/JOSAA.5.001270

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1270 / 1280

页数：11

共 13 条

[1] SCATTERING CALCULATIONS USING A MICROCOMPUTER [J].

BARBER, PW ;

WANG, DSY ;

LONG, MB .

APPLIED OPTICS, 1981, 20 (07) :1121-1123

[2]

BORN M, 1975, PRINCIPLES OPTICS, P522

[3] DIFFRACTION OF A PLANE WAVE AT A SINUSOIDALLY STRATIFIED DIELECTRIC GRATING [J].

BURCKHARDT, CB .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1966, 56 (11) :1502-+

[4] PLANE-WAVE EXPANSIONS USED TO DESCRIBE THE FIELD DIFFRACTED BY A GRATING [J].

HUGONIN, JP ;

PETIT, R ;

CADILHAC, M .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (05) :593-598

[5] THEORETICAL AND NUMERICAL STUDY OF A LOCALLY DEFORMED STRATIFIED MEDIUM [J].

HUGONIN, JP ;

PETIT, R .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (06) :664-674

[6] DIFFRACTION BY THICK, PERIODICALLY STRATIFIED GRATINGS WITH COMPLEX DIELECTRIC-CONSTANT [J].

KASPAR, FG .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1973, 63 (01) :37-45

[7] COMPUTATION OF LIGHT TRANSMITTED BY A THICK GRATING, FOR APPLICATION TO CONTACT PRINTING [J].

KASPAR, FG .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (12) :1623-1630

[8]

MAGNUS W, 1979, HILLS EQUATION

[9]

MARTIN LC, 1966, THEORY MICROSCOPE, pCH5

[10]

NYYSSONEN D, 1984, P SOC PHOTO-OPT INST, V480, P65, DOI 10.1117/12.943049

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