DESCRIPTION OF MICROSTRUCTURES IN LIGA-TECHNOLOGY

被引：18

作者：

BLEY, P

BACHER, W

MENZ, W

MOHR, J

机构：

[1] Kernforschungszentrum Karlsruhe GmbH (KfK) Institut für Mikrostrukturtechnik (IMT)

来源：

MICROELECTRONIC ENGINEERING | 1991年 / 13卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(91)90143-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The LIGA process is based on deep-etch lithography with synchrotron radiation, electroforming and plastic molding. This process allows three-dimensional microstructures to be fabricated from a variety of materials. By means of a sacrificial layer technique freely movable oscillating and rotating microstructures have been fabricated. The potential of the LIGA technology is demonstrated by the presentation of components for integrated optics, bandpass and highpass filters for the far infrared, acceleration sensors, and microgears.

引用

页码：509 / 512

页数：4

共 5 条

[1]

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[2]

Mohr, Burbaum, Bley, Menz, Wallrabe, Movable microstructures manufactured by the LIGA-process as basic elements for microsystems, Micro Systems, (1990)

[3]

Anderer, Ehrfeld, Mohr, Grundlagen für die röntgentiefenlithographische Herstellung eines planaren Wellenlägen-Demultiplexers mit selbstfokussierendem Reflexionsbeugung sgitter, KfK-Bericht, 4702, (1990)

[4]

Ruprecht, Untersuchungen an mikrostrukturierten Bandpaβfiltern für das ferne Infrarot und ihre Herstellung durch Röntgentiefenlithographie und Mikrogalvan onoformung, Doctoral Thesis, (1990)

[5]

Harmening, Ehrfeld, Untersuchungen zur Abformung von galvanisierbaren Mikrostrukturen mit groβer Strukturhöhe an elektrisch isolierenden und leitfähigen Kunststoffe n, Kfk-Bericht, 4711, (1990)

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