SYNCHROTRON RADIATION LITHOGRAPHY FOR DFB LASER GRATINGS

被引：3

作者：

NISHIDA, T ^{[1
]}

NAKAO, M ^{[1
]}

TAMAMURA, T ^{[1
]}

OZAWA, A ^{[1
]}

SAITO, Y ^{[1
]}

NISHIMURA, K ^{[1
]}

YOSHIHARA, H ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, LSI LABS, ATSUGI, KANAGAWA 24301, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1989年 / 28卷 / 11期

关键词：

D O I：

10.1143/JJAP.28.2333

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2333 / 2337

页数：5

共 9 条

[1]

Furuya K., 1983, Transactions of the Institute of Electronics and Communication Engineers of Japan, Section E (English), VE66, P561

[2] FAST DIRECT E-BEAM LITHOGRAPHIC FABRICATION OF 1ST-ORDER GRATINGS FOR 1.3-MU-M DFB LASERS [J].

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LIN, PSD ;

SCHERER, A ;

LEE, SF .

ELECTRONICS LETTERS, 1988, 24 (02) :123-125

[3] A NEW SILICONE-BASED NEGATIVE RESIST (SNR) FOR 2-LAYER RESIST SYSTEM [J].

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IMAMURA, S ;

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TAMAMURA, T .

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[4] 1.55 MU-M DFB LASER ARRAY WITH LAMBDA-4-SHIFTED 1ST-ORDER GRATINGS FABRICATED BY X-RAY-LITHOGRAPHY [J].

NAKAO, M ;

SATO, K ;

NISHIDA, T ;

TAMAMURA, T ;

OZAWA, A ;

SAITO, Y ;

OKADA, I ;

YOSHIHARA, H .

ELECTRONICS LETTERS, 1989, 25 (02) :148-149

[5] MOVPE-GROWN 1.5 MU-M DISTRIBUTED FEEDBACK LASERS ON CORRUGATED INP SUBSTRATES [J].

OISHI, M ;

NAKAO, M ;

ITAYA, Y ;

SATO, K ;

IMAMURA, Y .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (06) :822-827

[6] NOVEL METHOD TO FABRICATE CORRUGATION FOR A LAMBDA/4-SHIFTED DISTRIBUTED FEEDBACK LASER USING A GRATING PHOTOMASK [J].

OKAI, M ;

TSUJI, S ;

CHINONE, N ;

HARADA, T .

APPLIED PHYSICS LETTERS, 1989, 55 (05) :415-417

[7] 5-WAVELENGTH INTEGRATED DFB LASER ARRAYS WITH QUARTER-WAVE-SHIFTED STRUCTURES [J].

OKUDA, H ;

HIRAYAMA, Y ;

FURUYAMA, H ;

KINOSHITA, J ;

NAKAMURA, M .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (06) :843-848

[8]

SEKIMOTO M, 1984, 16TH INT C SOL STAT, P23

[9]

SHIBAYAMA A, 1988, AD HOC M SRI 88 TSUK

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