DETERMINATION OF THE COMPOSITION OF GESI ALLOY BY ELLIPSOMETRY

被引：9

作者：

LUKES, F

SCHMIDT, E

HUMLICEK, J

KEKOUA, MK

KHOUTSICHVILI, E

机构：

[1] JE PURKYNE UNIV, DEPT THEORET PHYS & ASTROPHYS, CS-61137 BRNO, CZECHOSLOVAKIA

[2] ACAD SCI GESSR, INST MET, TBILISI, GEORGIA

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1979年 / 53卷 / 01期

关键词：

D O I：

10.1002/pssa.2210530137

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An ellipsometric method is described which may be used to determine the composition of alloys and mixed crystals characterized by a low index of absorption. The method is especially suitable for semiconductors and insulators. It is applied to the determination of the composition of a GeSi alloy. Its accuracy in this special case is 0.4 at%. Copyright © 1979 WILEY‐VCH Verlag GmbH & Co. KGaA

引用

页码：321 / 325

页数：5

共 6 条

[1] OPTICAL MEASUREMENT OF FILM GROWTH ON SILICON AND GERMANIUM SURFACES IN ROOM AIR [J].