POST-IRRADIATION POLYMERIZATION OF E-BEAM NEGATIVE RESISTS - THEORETICAL-ANALYSIS AND METHOD OF INHIBITION

被引：20

作者：

OHNISHI, Y

ITOH, M

MIZUNO, K

GOKAN, H

FUJIWARA, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571185

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1141 / 1144

页数：4

共 9 条

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[3]

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[4]

OHNISHI Y, 1978, Patent No. 149333

[5]

OHNISHI Y, 1979, Patent No. 7956689

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OHNISHI Y, 1979, Patent No. 7917014

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FEIT, ED ;

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[8]

1977, 38TH ANN M JAP APPL

[9]

1974, Patent No. 3801538