A COMPACT SCHWARZSCHILD SOFT-X-RAY MICROSCOPE WITH A LASER-PRODUCED PLASMA SOURCE

被引：9

作者：

HORIKAWA, Y

NAGAI, K

MOCHIMARU, S

IKETAKI, Y

机构：

[1] T. Morokuma Research Laboratory, Olympus Optical Co, Ltd, Tokyo, 192, 2-3 Kuboyama-cho, Hachioji-shi

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1993年 / 172卷

关键词：

SOFT X-RAY MICROSCOPE; COMPACT SOFT X-RAY MICROSCOPE; SCHWARZSCHILD OBJECTIVE; LASER-PRODUCED PLASMA SOURCE; IMAGE CONTRAST; CONTRAST AT SOFT X-RAY REGIONS; BIOLOGICAL SPECIMEN; WATER WINDOW; MULTILAYER MIRROR; KNIFE EDGE RESPONSE;

D O I：

10.1111/j.1365-2818.1993.tb03412.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A compact Schwarzschild soft X-ray microscope using a laser-produced plasma soft X-ray source has been developed. The laser-produced plasma source, which is small but of high brilliance, has made it possible to use the soft X-ray microscope in a small laboratory. The microscope is composed of a Schwarzschild objective and a grazing incidence mirror condenser. Image contrast for biological specimens in soft X-ray regions is investigated briefly. It is possible to observe the fine structures of a thin specimen at a wavelength of 15 nm; at this wavelength high-contrast images of biological specimens have been obtained with a single laser shot of pulse width of 8 ns at a resolution of 0.3 mu m. The resolution of the system is limited by the detector.

引用

页码：189 / 194

页数：6

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