INFLUENCE OF THE OXYGEN STOICHIOMETRY ON THE STRUCTURAL AND OPTICAL-PROPERTIES OF REACTIVELY EVAPORATED ZRO(X) FILMS

被引：21

作者：

BELLOTTO, M ^{[1
]}

CARIDI, A ^{[1
]}

CEREDA, E ^{[1
]}

GABETTA, G ^{[1
]}

SCAGLIOTTI, M ^{[1
]}

MARCAZZAN, GMB ^{[1
]}

机构：

[1] UNIV MILAN,IST FIS GEN APPLICATA,I-20122 MILAN,ITALY

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 15期

关键词：

D O I：

10.1063/1.110590

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin ZrO(x) films are deposited by reactive electron beam evaporation of pure zirconium metal at different oxygen partial pressures. Stoichiometry, structural composition and optical properties of these films are studied. Results from x-ray diffraction and ellipsometry show that the crystallographic phase composition and the optical properties of the films can be controlled by a proper choice of the oxygen partial pressure. In comparison with direct evaporation of ZrO2, the reactive evaporation of zirconium metal improves the homogeneity of the refractive index along the film thickness thanks to an increased homogeneity in the crystallographic phase composition.

引用

页码：2056 / 2058

页数：3

共 7 条

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