CRYSTALLINE TRANSITIONS OF THIN LIF FILMS EVAPORATED ON AMORPHOUS SUBSTRATES

被引:18
作者
BALDACCHINI, G
CREMONA, M
MARTELLI, S
MONTEREALI, RM
DOCARMO, LCS
机构
[1] ENEA, Dipartimento Innovazione, Centro Ricerche Energia Frascati
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1995年 / 151卷 / 02期
关键词
D O I
10.1002/pssa.2211510208
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Polycrystalline thin LiF films thermally evaporated on amorphous substrates show two different final crystallite orientations depending on the substrate temperature during evaporation. Successive annealing of both kinds of samples induces an orientation change to a third stable configuration. The microstrucrural evolution is investigated by XRD techniques and SEM. Different film residual stress states dependent on the sample thermal history are also shown.
引用
收藏
页码:319 / 327
页数:9
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