COMPARATIVE-STUDY OF THE SPUTTERING PROCESS IN THE CONVENTIONAL AND MICROWAVE-COUPLED HOLLOW-CATHODE DISCHARGE

被引：9

作者：

CAROLI, S ^{[1
]}

SENOFONTE, O ^{[1
]}

VIOLANTE, N ^{[1
]}

FALASCA, O ^{[1
]}

MARCONI, A ^{[1
]}

BARBIERI, M ^{[1
]}

机构：

[1] UNIV CATTOLICA SACRO CUORE,INST MED LAVORO,I-00167 ROME,ITALY

来源：

JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY | 1986年 / 1卷 / 03期

关键词：

D O I：

10.1039/ja9860100231

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：231 / 235

页数：5

共 7 条

[1] AN INVESTIGATION OF THE POWER OF DETECTION OF THE HOLLOW-CATHODE SOURCE IN EMISSION-SPECTROSCOPY [J].

CAROLI, S ;

SENOFONTE, O ;

VIOLANTE, N ;

PETRUCCI, F ;

ALIMONTI, A .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1984, 39 (9-11) :1425-1430

[2] ANALYSIS OF MINOR ELEMENTS IN METALS BY MICROWAVE-COUPLED HOLLOW-CATHODE DISCHARGE [J].

CAROLI, S ;

PETRUCCI, F ;

ALIMONTI, A ;

ZARAY, G .

SPECTROSCOPY LETTERS, 1985, 18 (08) :609-617

[3] ANALYTICAL CAPABILITIES OF THE MICROWAVE-COUPLED HOLLOW-CATHODE DISCHARGE IN EMISSION-SPECTROSCOPY [J].

CAROLI, S ;

ALIMONTI, A ;

PETRUCCI, F .

ANALYTICA CHIMICA ACTA, 1982, 136 (APR) :269-276

[4]

CAROLI S, 1983, CAN J SPECTROSC, V28, P156

[5]

CAROLI S, 1982, TRENDS ANAL CHEM, V1, P368

[6]

CAROLI S, 1985, IMPROVED HOLLOW CATH, P13

[7] HIGH FREQUENCY EXCITATION OF VAPOURS PRODUCED BY HOLLOW CATHODE SPUTTERING [J].

HUMAN, HGC .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1970, B 25 (12) :647-&

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