BEAM MONITORING-SYSTEM FOR SIMULTANEOUS MEASUREMENT OF NEAR AND FAR FIELD PATTERNS IN HIGH REPETITION RATE KRF LASERS

被引:9
作者
YAGI, T
MATSUMI, Y
OHTA, K
BACHAR, J
SAITO, H
OBARA, M
FUJIOKA, T
机构
[1] HOKKAIDO UNIV,APPL ELECTR RES INST,SAPPORO,HOKKAIDO 060,JAPAN
[2] KEIO UNIV,DEPT ELECT ENGN,KOHOKU KU,YOKOHAMA,KANAGAWA 223,JAPAN
来源
APPLIED OPTICS | 1989年 / 28卷 / 17期
关键词
D O I
10.1364/AO.28.003775
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:3775 / 3778
页数:4
相关论文
共 3 条
[1]  
Gibbs J. D., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V739, P203
[2]  
SOUGH DM, 1987, P SOC PHOTOOPT INSTR, V739, P174
[3]  
YAGI T, 1988, 7TH P INT S GAS FLOW