ELECTRON-IMPACT DESORPTION OF IONS FROM GAS-COVERED SI(111) SURFACES

被引：19

作者：

NISHIJIMA, M ^{[1
]}

FUJIWARA, K ^{[1
]}

MUROTANI, T ^{[1
]}

机构：

[1] MITSUBISHI ELECT CORP LTD,CENT RES LAB,AMAGASAKI,HYOGO,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 07期

关键词：

D O I：

10.1063/1.322003

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3089 / 3091

页数：3

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