THEORETICAL PREDICTION OF THE ELECTRON BACKSCATTERING COEFFICIENT FOR MULTILAYER STRUCTURES

被引：8

作者：

AUGUST, HJ

WERNISCH, J

机构：

[1] Institut Für Angewandte Und Technische Physik, Technische Universität Wien, Vienna, A-1040

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1990年 / 157卷

关键词：

backscattering coefficient; Electron microscopy; electron probe microanalysis; electron scattering;

D O I：

10.1111/j.1365-2818.1990.tb02962.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Based on existing formulae for the backscattering coefficient for coated samples, i.e. for samples consisting of one film on a massive homogeneous substrate, a theory for the backscattering coefficient for multilayer structures is derived in a clear mathematical way without using approximations. The resulting expression is simple and ready to be applied in scanning electron microscopy or other related analytical techniques. 1990 Blackwell Science Ltd

引用

页码：247 / 254

页数：8

共 25 条

[1] MONTE-CARLO SCATTERING CALCULATIONS OF 24.8-MEV ELECTRONS THROUGH C, AL, CU, AND PB FOILS [J].