DIELECTRIC FUNCTION OF SI-SIO2 AND SI-SI3N4 MIXTURES

被引：126

作者：

ASPNES, DE

THEETEN, JB

机构：

[1] Bell Laboratories, Murray Hill

来源：

JOURNAL OF APPLIED PHYSICS | 1979年 / 50卷 / 07期

关键词：

D O I：

10.1063/1.325596

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Expressions for the dielectric function of Si-SiO2 and Si-Si3N4 composites are obtained by combining the Si-centered tetrahedral model of Philipp with composite-media theory. The similarity between dielectric-function spectra of a-Si and Si3N 4, with scaling parameters related by the plasma sum rule and the dielectric theory of Phillips and Van Vechten is used to obtain the polarization response function for the bond part of a given tetrahedron. By treating the N and O contributions on an equal basis with Si, reasonable agreement to existing spectra is obtained for these materials over an energy range of 0-8 eV.

引用

页码：4928 / 4935

页数：8

共 39 条

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