LIQUID-PHASE EPITAXIAL-GROWTH OF LINBO3 THIN-FILM USING LI2O-B2O3 FLUX SYSTEM

被引:36
作者
YAMADA, A [1 ]
TAMADA, H [1 ]
SAITOH, M [1 ]
机构
[1] SONY CORP,CORP RES LABS,SHINAGAWA KU,TOKYO 141,JAPAN
关键词
D O I
10.1016/0022-0248(93)90246-S
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
LiNbO3 thin film optical waveguides were fabricated by liquid phase epitaxy. In order to improve the crystallinity and optical transparency of the film, a 5 mol% MgO-doped LiNbO3 substrate and Li2O-B2O3 flux system were used instead of a conventional combination of LiTaO3 Substrate and Li2O-V2O5 flux system. Dependence of film properties on the melt composition was investigated in detail. As a result, high crystallinity with a small linewidth of 11.4 arc sec in the X-ray rocking curve, and good surface morphology with perfect mirror surface were realized by choosing a suitable melt composition. The chemical composition of the grown film was estimated to be nearly stoichiometric from results of several characterizations, and the Li/Nb ratio of the film could not be widely changed by changing the Li2O/Nb2O5 ratio in the melt. The as-grown film shows a perfect transparency for the wavelength down to the fundamental absorption edge resulting in a small guided optical wave propagation loss of less than 1 dB/cm at a wavelength of 458 nm. Ferroelectric domain inversion phenomena at the film-substrate interface, and preliminary results of trial on controlling film properties by Mg, Zn, Na and Ti doping are also shown and discussed.
引用
收藏
页码:48 / 60
页数:13
相关论文
共 30 条
[1]   PROPERTIES OF IONS OF IRON TRANSITION GROUP IN LATTICE OF SINGLE-CRYSTALLINE LITHIUM-NIOBATE [J].
ARSENEV, PA ;
BARANOV, BA .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1972, 9 (02) :673-&
[2]   GROWTH OF LINBO3 THIN-FILMS BY LIQUID-PHASE EPITAXIAL TECHNIQUES [J].
BALLMAN, AA ;
BROWN, H ;
TIEN, PK ;
RIVASANSEVERINO, S .
JOURNAL OF CRYSTAL GROWTH, 1975, 29 (03) :289-295
[3]   LIQUID-PHASE EPITAXY OF LINBO3 THIN-FILMS FOR INTEGRATED OPTICS [J].
BAUDRANT, A ;
VIAL, H ;
DAVAL, J .
MATERIALS RESEARCH BULLETIN, 1975, 10 (12) :1373-1377
[4]   LIQUID-PHASE EPITAXIAL-GROWTH OF LINBO3 THIN-FILMS [J].
BAUDRANT, A ;
VIAL, H ;
DAVAL, J .
JOURNAL OF CRYSTAL GROWTH, 1978, 43 (02) :197-203
[5]   CURIE TEMPERATURE BIREFRINGENCE AND PHASE-MATCHING TEMPERATURE VARIATIONS IN LINBO3 AS A FUNCTION OF MELT STOICHIOMETRY [J].
BERGMAN, JG ;
ASHKIN, A ;
BALLMAN, AA ;
DZIEDZIC, JM ;
LEVINSTEIN, HJ ;
SMITH, RG .
APPLIED PHYSICS LETTERS, 1968, 12 (03) :92-+
[6]   INCREASED OPTICAL-DAMAGE RESISTANCE IN LITHIUM-NIOBATE [J].
BRYAN, DA ;
GERSON, R ;
TOMASCHKE, HE .
APPLIED PHYSICS LETTERS, 1984, 44 (09) :847-849
[7]   NONSTOICHIOMETRY AND CRYSTAL GROWTH OF LITHIUM NIOBATE [J].
CARRUTHE.JR ;
PETERSON, GE ;
GRASSO, M ;
BRIDENBA.PM .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (05) :1846-+
[8]   GROWTH OF THIN-FILMS OF LITHIUM-NIOBATE BY CHEMICAL VAPOR-DEPOSITION [J].
CURTIS, BJ ;
BRUNNER, HR .
MATERIALS RESEARCH BULLETIN, 1975, 10 (06) :515-520
[9]  
ELWELL D, 1975, CRYSTAL GROWTH HIGH, pCH3
[10]   DEFECTS OF LITHIUM-NIOBATE CRYSTALS HEAVILY DOPED WITH MGO [J].
HU, LJ ;
CHANG, YH ;
LIN, IN ;
YANG, SJ .
JOURNAL OF CRYSTAL GROWTH, 1991, 114 (1-2) :191-197