LASER-ASSISTED PROCESSES IN THE MICROELECTRONIC INDUSTRY

被引：6

作者：

BUDIN, JP

BOULMER, J

DEBARRE, D

机构：

来源：

THIN SOLID FILMS | 1989年 / 175卷

关键词：

D O I：

10.1016/0040-6090(89)90817-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：109 / 118

页数：10

共 23 条

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SIFFERT, P .

APPLIED SURFACE SCIENCE, 1989, 36 (1-4) :384-393

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