STUDY OF SPACE-CHARGE EFFECT BY COMPUTER

[1] EXPERIMENTELLE BESTIMMUNG DER ENERGIEVERTEILUNG IN THERMISCH AUSGELOSTEN ELEKTRONENSTRAHLEN [J]. ZEITSCHRIFT FUR PHYSIK, 1954, 139 (02): : 115 - 146

[2] BROERS AN, 1971, 11TH P S EL ION LAS

[3] CREWE AV, 1978, OPTIK, V50, P205

[4] CREWE AV, 1978, OPTIK, V52, P337

[5] DAYAN PS, 1981, J VAC SCI TECHNOL, V19, P1194

[6] ANALYSIS OF THE ENERGY BROADENING IN AN ELECTRON-BEAM SYSTEM [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (09) : 5596 - 5602

[7] GOTO E, 1978, 8 P INT C EL ION BEA, P135

[8] MUTUAL REPULSION EFFECTS IN A HIGH THROUGHPUT E-BEAM LITHOGRAPHY COLUMN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1106 - 1110

[9] ELECTRON-BEAM BROADENING EFFECTS CAUSED BY DISCRETENESS OF SPACE-CHARGE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1680 - 1685

[10] ENERGIEVERTEILUNGEN IN THERMISCH AUSGELOSTEN ELEKTRONENSTRAHLEN [J]. ZEITSCHRIFT FUR PHYSIK, 1963, 173 (03): : 294 - &

[1] EXPERIMENTELLE BESTIMMUNG DER ENERGIEVERTEILUNG IN THERMISCH AUSGELOSTEN ELEKTRONENSTRAHLEN [J]. ZEITSCHRIFT FUR PHYSIK, 1954, 139 (02): : 115 - 146

[2] BROERS AN, 1971, 11TH P S EL ION LAS

[3] CREWE AV, 1978, OPTIK, V50, P205

[4] CREWE AV, 1978, OPTIK, V52, P337

[5] DAYAN PS, 1981, J VAC SCI TECHNOL, V19, P1194

[6] ANALYSIS OF THE ENERGY BROADENING IN AN ELECTRON-BEAM SYSTEM [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (09) : 5596 - 5602

[7] GOTO E, 1978, 8 P INT C EL ION BEA, P135

[8] MUTUAL REPULSION EFFECTS IN A HIGH THROUGHPUT E-BEAM LITHOGRAPHY COLUMN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1106 - 1110

[9] ELECTRON-BEAM BROADENING EFFECTS CAUSED BY DISCRETENESS OF SPACE-CHARGE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1680 - 1685

[10] ENERGIEVERTEILUNGEN IN THERMISCH AUSGELOSTEN ELEKTRONENSTRAHLEN [J]. ZEITSCHRIFT FUR PHYSIK, 1963, 173 (03): : 294 - &