LINEARIZATION AND TEMPERATURE COMPENSATION UP TO ONE ATMOSPHERE FOR THE SPINNING ROTOR GAUGE

被引:13
作者
LINDENAU, BE
FREMEREY, JK
机构
[1] Institut für Grenzfiachenforschuns und Vakuumphvsik, W-517C, Jülich
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 05期
关键词
D O I
10.1116/1.577191
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
While the deceleration-versus-pressure characteristic of the spinning rotor gauge (SRG) shows excellent proportionality under molecular flow conditions, strong deviations built up at the viscous flow regime. By linearization of the SRG characteristic and on-line thermal correction of the gas parameters entering the SRG pressure evaluation procedure an accuracy of 5% has been achieved for a variety of common gases under viscous flow conditions. For the thermal correction the new system comprises an ohmic temperature sensor attached to the rotor chamber. The linear pressure range of the SRG now extends from 1-mu-Pa up to 1 atm (11 decades). Furthermore, the system is well suited for determination of the gas viscosity and its thermal increment.
引用
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页码:2737 / 2743
页数:7
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