LANGMUIR PROBE STUDIES OF OXYGEN AND CHLORINE DISCHARGES IN A 13.56 MHZ PLASMA REACTOR

被引：19

作者：

ALASSADI, KF ^{[1
]}

BROWN, NMD ^{[1
]}

CHATTERTON, PA ^{[1
]}

REES, JA ^{[1
]}

机构：

[1] UNIV LIVERPOOL,DEPT ELECT ENGN & ELECTR,LIVERPOOL L69 3BX,ENGLAND

来源：

VACUUM | 1991年 / 42卷 / 15期

关键词：

D O I：

10.1016/0042-207X(91)90009-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The paper describes results obtained using a self-compensated rf Langmuir probe to determine fundamental plasma parameters. The quantities investigated are the floating and plasma potentials, the electron and positive ion number densities and the electron temperature as a function of the discharge power (at 13.56 MHz) which varied from 10 to 150 W for oxygen and from 10 to 70 W for chlorine when the pressure of the two gases was kept at 30 mtorr. The results demonstrate the values of the Langmuir probe as a diagnostic tool for processing plasmas.

引用

页码：1009 / 1012

页数：4

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