STUDIES OF INTERFACIAL COMPOSITION OF TIN FILMS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION USING AN INSITU SCRATCHING DEVICE

被引：11

作者：

HILTON, MR

MIDDLEBROOK, AM

RODRIGUES, G

SALMERON, M

SOMORJAI, GA

机构：

[1] UNIV CALIF BERKELEY,DEPT MAT SCI & MIN ENGN,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,DEPT CHEM,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573681

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2797 / 2800

页数：4

共 9 条

[1]

DAVIS LE, 1976, HDB AUGER ELECTRON S

[2] TECHNIQUE FOR DETECTING CRITICAL LOADS IN SCRATCH TEST FOR THIN-FILM ADHESION [J].

GREENE, JE ;

WOODHOUSE, J ;

PESTES, M .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1974, 45 (06) :747-749

[3] ADHESION OF TITANIUM NITRIDE COATINGS ON HIGH-SPEED STEELS [J].

HELMERSSON, U ;

JOHANSSON, BO ;

SUNDGREN, JE ;

HENTZELL, HTG ;

BILLGREN, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (02) :308-315

[4] COMPOSITION, MORPHOLOGY AND MECHANICAL-PROPERTIES OF PLASMA-ASSISTED CHEMICALLY VAPOR-DEPOSITED TIN FILMS ON M2-TOOL STEEL [J].

HILTON, MR ;

NARASIMHAN, LR ;

NAKAMURA, S ;

SALMERON, M ;

SOMORJAI, GA .

THIN SOLID FILMS, 1986, 139 (03) :247-260

[5] ADHESION, FRICTION AND WEAR OF THIN HARD COATINGS [J].

HINTERMANN, HE .

WEAR, 1984, 100 (1-3) :381-397

[6]

Laeng P., 1981, P ELECTROCHEM SOC, V81-7, P723

[7]

MIYOSHI K, 1983, AM CERAM SOC BULL, V62, P494

[8] SCRATCH ADHESION TESTING OF HARD COATINGS [J].

PERRY, AJ .

THIN SOLID FILMS, 1983, 107 (02) :167-180

[9] VERY HIGH-RATE REACTIVE SPUTTERING OF TIN, ZRN AND HFN [J].

SPROUL, WD .

THIN SOLID FILMS, 1983, 107 (02) :141-147

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