INFLUENCE OF ADSORPTION AND STEP RECONSTRUCTION ON THE GROWTH AND ETCHING VECTORS OF SILICON (111)

被引：37

作者：

VANENCKEVORT, WJP

GILING, LJ

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1978年 / 45卷 / 01期

关键词：

D O I：

10.1016/0022-0248(78)90419-0

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：90 / 96

页数：7

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