OPTICAL-PROPERTIES OF SUPERTHIN NIOBIUM FILMS DEPOSITED ON CRYSTALLINE QUARTZ

被引:26
作者
ALIEVA, EV [1 ]
FIRSOV, EI [1 ]
KUZIK, LA [1 ]
YAKOVLEV, VA [1 ]
PUDONIN, FA [1 ]
机构
[1] PN LEBEDEV PHYS INST,MOSCOW,USSR
关键词
D O I
10.1016/0375-9601(91)90635-L
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Infrared reflection spectra of 3-100 angstrom thick niobium films deposited by high-frequency sputtering on crystalline quartz have been investigated. Phase spectroscopy of surface electromagnetic waves (SEWs) was used to measure SEW dispersion on these samples. Dielectric constants of niobium films of various thicknesses have been determined in this spectral region. For thicknesses 3-12 angstrom a sharp change in the dielectric constant was observed.
引用
收藏
页码:89 / 95
页数:7
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