LASER ABLATION OF Y2O3 IN AN OXYGEN ATMOSPHERE

被引:19
作者
DYE, RC [1 ]
MUENCHAUSEN, RE [1 ]
NOGAR, NS [1 ]
机构
[1] UNIV CALIF LOS ALAMOS SCI LAB,CTR EXPLORATORY RES & DEV,LOS ALAMOS,NM 87545
关键词
D O I
10.1016/0009-2614(91)80308-K
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A Y203 Pressed powder target was ablated by pulses from a XeCl excimer laser, operating at 308 nm, 150 mJ/pulse, almost-equal-to 15 ns/pulse and 20 Hz. Emission spectra from Y* and YO* were recorded as a function of ambient oxygen pressure in the range 10(-5)-4 x 10(-1) Torr, at a peak laser fluence of almost-equal-to 4 J/cm2. A kinetic model is developed to describe the results, and the application to production of laser-deposited high-temperature superconductor thin films is discussed.
引用
收藏
页码:531 / 536
页数:6
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