THE MEVVA ION-SOURCE FOR HIGH-CURRENT METAL-ION IMPLANTATION

被引：20

作者：

BROWN, I

WASHBURN, J

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 21卷 / 2-4期

关键词：

D O I：

10.1016/0168-583X(87)90826-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：201 / 204

页数：4

共 14 条

[1] HIGH-ENERGY HEAVY-IONS - TECHNIQUES AND APPLICATIONS [J].

ALONSO, JR .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 244 (1-2) :262-272

[2]

BROWN G, 1985, IEEE T NUCL SCI, V32, P1723

[3] HIGH-CURRENT ION-SOURCE [J].

BROWN, IG ;

GAVIN, JE ;

MACGILL, RA .

APPLIED PHYSICS LETTERS, 1985, 47 (04) :358-360

[4] METAL VAPOR VACUUM-ARC ION-SOURCE [J].

BROWN, IG ;

GALVIN, JE ;

GAVIN, BF ;

MACGILL, RA .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (06) :1069-1084

[5]

BROWN IG, LBL21487 REP

[6] ANALYSIS OF ELECTRODE PRODUCTS EMITTED BY DC ARCS IN A VACUUM AMBIENT [J].

DAVIS, WD ;

MILLER, HC .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (05) :2212-+

[7] BEAM FORMATION AND SPACE-CHARGE NEUTRALIZATION [J].

GREEN, TS .

IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1976, 23 (02) :918-928

[8] INTENSE ION-BEAMS [J].

GREEN, TS .

REPORTS ON PROGRESS IN PHYSICS, 1974, 37 (10) :1257-+

[9]

KELLER R, 1980, GSI812 ANN REP, P263

[10]

Lafferty J. M., 1980, VACUUM ARCS THEORY A

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