SPUTTERING YIELDS OF CONDENSED RARE-GASES

被引：27

作者：

BALAJI, V ^{[1
]}

DAVID, DE ^{[1
]}

MAGNERA, TF ^{[1
]}

MICHL, J ^{[1
]}

URBASSEK, HM ^{[1
]}

机构：

[1] TECH UNIV BRUNSWICK,INST THEORET PHYS,W-3300 BRAUNSCHWEIG,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 46卷 / 1-4期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/0168-583X(90)90743-E

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Improved experimental techniques were employed to measure the initial sputtering yields of condensed rare gas targets under 0.75-5 keV ion bombardment. These sputtering yields show a strong nonlinear dependence on the total stopping power. The experimental results for condensed Ar, Kr, and Xe targets are consistent with a systematic change from a linear collision cascade to evaporation and to a gas-flow mechanism as the deposited energy density increases. For condensed Ne sputtered by heavy projectiles. the yields are larger than can be explained by any existing quantitative model. The sputtering yields for all targets are found to approach a plateau values as sputtering progresses. This is attributed to surface roughening and the initial slope is used to determine the size of the impact damage area. © 1990.

引用

页码：435 / 440

页数：6

共 19 条

[1]

BOHDANSKY J, 1987, NUCL INSTRUM METH B, V18, P509

[2] SPUTTERING OF ICES - A REVIEW [J].

BROWN, WL ;

JOHNSON, RE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 13 (1-3) :295-303

[3] CLUSTER IONS FROM KEV-ENERGY ION AND ATOM BOMBARDMENT OF FROZEN GASES [J].

DAVID, DE ;

MAGNERA, TF ;

TIAN, R ;

STULIK, D ;

MICHL, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 14 (4-6) :378-391

[4] KEV-ENERGY ION AND ATOM BOMBARDMENT OF LOW-TEMPERATURE SOLIDS - RADIATION-DAMAGE, SPUTTERING, AND MECHANISM [J].

DAVID, DE ;

MAGNERA, TF ;

TIAN, R ;

MICHL, J .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1986, 99 (1-4) :247-265

[5] SPUTTERING OF SOLID NEON BY KEV HYDROGEN-IONS [J].

ELLEGAARD, O ;

SCHOU, J ;

SORENSEN, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 13 (1-3) :567-571

[6]

HENDERSON WT, 1970, PRINCIPLE TECHNIQUES, V2

[7] MECHANISMS FOR THE DESORPTION OF LARGE ORGANIC-MOLECULES [J].

JOHNSON, RE .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1987, 78 :357-392

[8]

LINDHARD J, 1968, KGL DAN VIDENSK SELS, V36

[9]

Lu C., 1984, APPL PIEZOELECTRIC Q, VVolume 7, P19, DOI [10.1016/B978-0-444-42277-4.50008-9, DOI 10.1016/B978-0-444-42277-4.50008-9]

[10] SECONDARY ION MASS-SPECTROMETRY OF LOW-TEMPERATURE SOLIDS [J].

MICHL, J .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1983, 53 (SEP) :255-272

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