SPEED ENHANCEMENT OF PMMA RESIST

被引：54

作者：

MOREAU, W

MERRITT, D

MOYER, W

HATZAKIS, M

JOHNSON, D

PEDERSON, L

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

[2] IBM CORP,SAN JOSE RES CTR,SAN JOSE,CA 95193

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570373

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1989 / 1991

页数：3

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