CONSTANT-TEMPERATURE INTEGRATED VACUUM SENSOR

被引：3

作者：

HUANG, JB

TONG, QY

机构：

[1] South-East Univ, China

来源：

ELECTRONICS LETTERS | 1988年 / 24卷 / 23期

关键词：

Amplifiers; Operational - Integrated Circuits - Vacuum Technology--Gages;

D O I：

10.1049/el:19880976

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

An integrated vacuum sensor based on heat transfer at a constant chip temperature (CCT) is introduced. It consists of a temperature-sensing stage, a CMOS op-amp and a heating branch circuit. All three parts are integrated on one chip and connected to form a negative feedback loop for CCT operation. The heating power of the sensor chip was used to indicate the vacuum which affects the heat transfer between the chip and the vacuum ambient.

引用

页码：1429 / 1430

页数：2