THE PERFORMANCE OF CAPACITIVE ULTRASONIC TRANSDUCERS USING V-GROOVED BACKPLATES

Capacitive transducers provide a means of coupling ultrasound efficiently into air. Many investigations of these transducers have been reported but none have provided a reliable means of producing a transducer resonating at a specific frequency. This paper describes the performance of capacitive transducers constructed with v-groove backplates and membranes of varying thicknesses, and gives design criteria for producing transducers at well defined frequencies.