INTEGRATED TIN OXIDE ODOR SENSORS

This paper describes the design and fabrication of an integrated array of tin oxide odour sensors using planar micro-electronic silicon technology. Some fundamental properties of the device structure are discussed, including power consumption, along with its response to several odours. In addition, the sensing element is modelled as a pair of finite coplanar electrodes lying upon a thin oxide layer, and an analytical conductance equation obtained that relates its conductance to electrode geometry in a diffusion-limited model. The physical conditions that require the use of a diffusion or reaction model are discussed.