POLYMERIZATION OF BENZENE IN A CAPACITIVELY COUPLED RF PLASMA

被引：27

作者：

DUVAL, M ^{[1
]}

THEORET, A ^{[1
]}

机构：

[1] HYDRO QUEBEC INST RES,VARENNES,QUEBEC,CANADA

来源：

关键词：

D O I：

10.1002/app.1973.070170216

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：527 / 537

页数：11

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[3]

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[4]

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[5]

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[6]

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[7]

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[8]

SPEDDING PL, 1969, CHEMICAL ENGINEER

[9] DIELECTRIC LOSSES IN POLYMER FILMS FORMED BY A DISCHARGE [J].

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[10] ORGANOSILICON FILMS FORMED BY AN RF PLASMA POLYMERIZATION PROCESS [J].

VASILE, MJ ;

SMOLINSK.G .