ELECTRON-IRRADIATION OF POLY(OLEFIN SULFONES) - APPLICATION TO ELECTRON-BEAM RESISTS

被引：91

作者：

BOWDEN, MJ ^{[1
]}

THOMPSON, LF ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED POLYMER SCIENCE | 1973年 / 17卷 / 10期

关键词：

D O I：

10.1002/app.1973.070171022

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：3211 / 3221

页数：11

共 18 条

[1] GAMMA-RADIOLYSIS OF POLY(BUTENE-1 SULFONE) AND POLY(HEXENE-1 SULFONE) [J].

BROWN, JR ;

ODONNELL, JH .

MACROMOLECULES, 1972, 5 (02) :109-&

[2] GAS-PHASE COPOLYMERIZATION OF SULFUR-DIOXIDE AND BUTENE-1 [J].

BROWN, JR ;

ODONNELL, JH .

JOURNAL OF POLYMER SCIENCE PART A-1-POLYMER CHEMISTRY, 1972, 10 (07) :1997-&

[3] EXPOSURE OF PHOTORESISTS - ELECTRON BEAM EXPOSURE OF NEGATIVE PHOTORESISTS [J].

BROYDE, B .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (09) :1241-&

[4]

CHARLESBY A, 1960, ATOMIC RADIATION POL

[5] EFFECT OF STRUCTURE ON POLYMERIZABILITY - OLEFIN POLYSULFONE FORMATION [J].

COOK, RE ;

DAINTON, FS ;

IVIN, KJ .

JOURNAL OF POLYMER SCIENCE, 1958, 29 (120) :549-556

[6] THE KINETICS OF POLYSULPHONE FORMATION .1. THE FORMATION OF 1-BUTENE POLYSULPHONE AT 25-DEGREES-C [J].

DAINTON, FS ;

IVIN, KJ .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1952, 212 (1108) :96-112

[7] SOME THERMODYNAMIC AND KINETIC ASPECTS OF ADDITION POLYMERISATION [J].

DAINTON, FS ;

IVIN, KJ .

QUARTERLY REVIEWS, 1958, 12 (01) :61-92

[8]

GLANG R, 1970, HDB THIN FILM TECHNO, pCH7

[9] HIGH-RESOLUTION POSITIVE RESISTS FOR ELECTRON-BEAM EXPOSURE [J].

HALLER, I ;

HATZAKIS, M ;

SRINIVASAN, R .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1968, 12 (03) :251-+

[10]

HEIDENREICH R, TO BE PUBLISHED

← 1 2 →