HIGH-RESOLUTION LASER TRANSDUCER OF LINEAR DISPLACEMENTS

被引：7

作者：

DOBOSZ, M

机构：

来源：

OPTICAL ENGINEERING | 1992年 / 31卷 / 03期

关键词：

DISPLACEMENT MEASUREMENTS; INTERFEROMETERS; LASER DIODES; HOLOGRAPHIC GRATINGS;

D O I：

10.1117/12.56098

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A prototype of a new optical length transducer is presented. The system is based on a laser diode illumination and a holographic grating applied as a length master. The theory of the optical method is formulated using Doppler description. General characteristics of the device construction and metrological feasibilities of the prototype are presented. Resolution of 0.02-mu-m and nonlinearity error +/- 0.05-mu-m in the measuring range of 4.5 mm are obtained.

引用

页码：500 / 504

页数：5