CURRENT-CONTROLLED GROWTH AND DOPANT MODULATION IN LIQUID-PHASE EPITAXY

被引:68
作者
KUMAGAWA, M
WITT, AF
LICHTENSTEIGER, M
GATOS, HC
机构
[1] MIT, DEPT MET & MAT SCI, CAMBRIDGE, MA 02139 USA
[2] MIT, CTR MAT SCI & ENGN, CAMBRIDGE, MA 02139 USA
关键词
D O I
10.1149/1.2403505
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:583 / 584
页数:2
相关论文
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[2]   MODULATION OF DOPANT SEGREGATION BY ELECTRIC CURRENTS IN CZOCHRALSKI-TYPE CRYSTAL GROWTH [J].
LICHTENSTEIGER, M ;
WITT, AF ;
GATOS, HC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (06) :1013-+
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