HIGH-Q SELECTIVE FILTERS USING MECHANICAL RESONANCE OF SILICON BEAMS

被引：6

作者：

HRIBSEK, MF ^{[1
]}

NEWCOMB, RW ^{[1
]}

机构：

[1] UNIV MARYLAND, DEPT ELECT ENGN, COLLEGE PK, MD 20742 USA

来源：

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS | 1978年 / 25卷 / 04期

关键词：

D O I：

10.1109/TCS.1978.1084466

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：215 / 222

页数：8

共 24 条

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FINNE, RM ;

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[6]

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[7] V GROOVE MOS-TRANSISTOR TECHNOLOGY [J].

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SALAMA, CAT .

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[8]

HRIBSEK M, 1974, THESIS BELGRADE

[9] ANISOTROPIC ETCHING OF SILICON [J].

LEE, DB .

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[10]

MASON WP, 1966, CRYSTAL PHYSICS INTE

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